| 型号 | SV-C4500S4 | SV-C4500H4 | SV-C4500W4 | SV-C4500S8 | SV-C4500H8 | SV-C4500W8 |
| SV-C4500S4 | SV-C4500H4 | SV-C4500W4 | SV-C4500S8 | SV-C4500H8 | SV-C4500W8 | |
| X轴驱动部测量范围 | 100mm | 200mm | ||||
| Z轴检出器测量范围 | 800μm/80μm/8μm | |||||
| Z轴检出器分辨率 | 0.01μm（800μm）/0.001μm（80μm）/0.0001μm（8μm） | |||||
注：更多参数或者要求可以联系客服咨询
